IWH Series 3 with 2-link dual arm and body series 3

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IWH Series 3 with 2-link dual arm and body series 3

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Our wafer handler robots have the potential to increase the throughput of an application. The two independent arms mean that the wafers on a station can be replaced very quickly and thus empty runs are prevented.

Characteristics

Excellent structural rigidity
Wafer handling of up to 300mm
Maximum reliability and precision
Easy connection of a linear track to the robot controller
Very smooth running
® Backlash free Harmonic Drive gears
Absolute, incremental encoder or resolver
Integrated 2-channel vacuum display
Including „Standard“ or „Advanced“ Controller & Software
ISO 1 clean-room environment compatible
MTBF: > 50,000 operating hours
Made in Germany

More Information

More Information
Repeatability	T: +/- 0,02°/s R: +/- 0,02 mm Z: +/- 0,02 mm
Working range	Z: 7", 10", 13", 15", 17", 21" radial: 10", 14" theta: 500
Payload	up to 1.25 kg (per arm)
Maximum speed	T: 360°/s R: 1100 mm/s Z: 425 mm/s
Power supply	115 – 230 VAC 50 – 60 Hz 500 VA (standard) 550 VA (advanced)
Main interface	RS-232 [DB9] Ethernet [RJ-45]
Weight	approx. 25 – 40 kg

Downloads 1

ROBOTIK Allgemein/Generally

Katalog Robotik / Catalogue Robotic

(Size: 4.8 MB)

Last update 2024/03/08

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