The iLD Linear Track series.

To increase the robot's range of action, the handling system can be easily extended by an additional axis that is fully integrated into the system. Depending on the application, it can be mounted below the wafer handler or with the wafer handler mounted on the side. Thanks to the use of linear motors, the linear axes are very dynamic, low-maintenance and smooth-running. They achieve high acceleration values and speeds, move to positions very precisely and operate practically wear-free due to the absence of mechanical connecting links. Thanks to the segment design, lengths of up to 32 metres can be realised with absolute encoders.

The isel Linear units in the iLD series are built on rigid aluminium profiles. The guides consist of proven profile guide rails and shaft carriages with recirculating ball bearings. The magnetic length measuring system is also integrated. isel linear motor units have the advantage of high accelerations and travelling speeds in this area. The iron-core linear motors can achieve very high continuous forces. An optionally available integrated brake also allows the iLD to be used in a vertical arrangement. Thanks to the "made by isel" concept, an optimum price-performance ratio can be offered, which means very short amortisation times for you as a customer.