Highlights
- ISO 1 clean room compatible
- Absolute (digital) or incremental encoder
- Robot Control Centre (RCC) included
- Made in Germany
Facts
Product type
Semiconductor
Features
- Excellent structural rigidity
- Maximum reliability and precision
- Customised adaptations possible
Options
- High-end controller for controlling complex systems
- Simple connection of Prealigner, Linear Track and other peripherals to the robot controller
- Top (TA) or bottom (BA) mounting
iWH Series 1 with 3-link HD arm and Series 1 base body
Series 1wafer handlers are designed for wafer handling. Thanks to the modular system, various base bodies from 7" to 21" Z-stroke can be combined with many different arm assemblies from 10.5" to 28". Depending on the combination of axes, handling weights of up to 3 kg are possible.
| iWH 1 | 2 Link HD arm - Series 1 | |
|---|---|
| Repeat accuracy | T: +/- 0,02 ° R: +/- 0.02 mm Z: +/- 0.02 mm |
| Working range | Z: 10", 13", 17", 21" radial: 10", 12", 14", 16", 20" theta: 450° |
| Payload | up to 3 kg |
| Max. Max. speed | T: 360°/s - 1500°/s2 R: 1000 mm/s - 4500 mm/s2 Z: 450 mm/s - 2000 mm/s2 |
| Mains connection | 110 / 230V AC |
| Interface: RS-232 | RS-232 [DB9] Ethernet [RJ-45] |
| Weight | approx. 25 - 32 kg |
Heavy Duty Series 1
iWH 1 - 3-link HD arm
Your contact
Thank you for your interest in our product. We are very pleased. Please write to us or call us for further information.
