Highlights
- Integrated 2-channel vacuum display
- Advanced controller & software included
- ISO 1 clean room compatible
- Made in Germany
Facts
Product type
Semiconductor
Features
- Excellent structural rigidity
- Handling of wafers up to 300 mm
- Maximum reliability and accuracy
- Simple connection of a Linear Track to the robot controller
- Very smooth running
- Backlash-free Harmonic Drive® gears
- Absolute, incremental encoders or resolvers
- MTBF: > 50,000 operating hours
Options
- High-end controller for controlling complex systems
- Simple connection of Prealigner, Linear Track and other peripherals to the robot controller
- Top (TA) or bottom (BA) mounting
iWH 2 - 2-Link Dual Arm Series 3
This state-of-the-art wafer handling robot offers excellent structural rigidity and is specially designed to handle wafers up to 300 mm in diameter with maximum reliability and precision.
Thanks to the simple connection of a linear track to the robot controller, you can easily integrate complex motion sequences. The Wafer Handling Robot is characterised by its extremely smooth operation, which makes it ideal for sensitive production environments. The backlash-free Harmonic Drive® gears guarantee maximum accuracy and durability.
Our technology allows you to choose between absolute, incremental encoders or resolvers to meet your specific requirements. An integrated 2-channel vacuum display also ensures maximum control and safety during operation.
The robot is supplied with a standard or advanced controller and suitable software, so you are ready to go straight away. Designed for use in ISO 1 cleanroom compliant environments, it fulfils the highest standards of cleanliness and quality.
With a mean time between failures (MTBF) of over 50,000 hours, this robot stands for outstanding reliability and performance. Manufactured in Germany, it combines first-class engineering and innovative technologies.
| iWH SHD Super Heavy Duty | |
|---|---|
| Repeat accuracy | T: +/- 0,02 ° R: +/- 0.02 mm Z: +/- 0.02 mm |
| Working range | Z: 7", 10", 13", 15", 17", 21" radial: 10", 14" theta: 500° |
| Payload | up to 1.25 kg (per arm)* |
| Max. Max. speed | T: 360°/s R: 1100 mm/s Z: 425 mm/s |
| Mains connection | 115 - 230 VAC 50 - 60 Hz 550 VA |
| Interface interface | RS-232 [DB9] Ethernet [RJ-45] |
| Weight | approx. 25 - 40 kg |
iWH 2 - Series 3
iWH 2 - 2-Link Dual Arm Series 3
Your contact
Thank you for your interest in our product. We are very pleased. Please write to us or call us for further information.
