Highlights
- Integrated 2-channel vacuum display
- Advanced controller & software included
- ISO 1 clean room compatible
- Made in Germany
Facts
Product type
Semiconductor
Features
- Excellent structural rigidity
- Proven in the handling of panels
- highest reliability and precision
- seamless integration with Prealigner, Linear guide and other peripheral components
Options
- High-end controller for controlling complex systems
- Simple connection of Prealigner, Linear Track and other peripherals to the robot controller
- Top (TA) or bottom (BA) mounting
iWH 2 - 2-Super Heavy Duty Arm + Body Series SHD
Discover the Wafer Handling Robot - the ultimate solution for your wafer handling needs. This sophisticated device is characterised by its excellent structural rigidity, which guarantees you outstanding performance and durability.
The Wafer Handling Robot has a proven track record in wafer handling and offers you maximum reliability and precision. With this robot, you can be sure that your processes will be efficient and error-free.
Seamless integration with Prealigner, Linear guide and other peripheral components makes this robot an indispensable part of your production line. It enables you to expand and optimise existing systems effortlessly.
| iWH SHD Super Heavy Duty | |
|---|---|
| Repeat accuracy | T: +/- 0,02 ° R: +/- 0.02 mm Z: +/- 0.02 mm |
| Working range | Z: 13", 15" radial: 14", 16" theta: 500° |
| Payload | up to 5 kg (per arm)* |
| Max. Max. speed | T: 180°/s R: 800 mm/s Z: 300 mm/s |
| Mains connection | 115 - 230 VAC 50 - 60 Hz800 VA |
| Interface: RS-232 | RS-232 [DB9] Ethernet [RJ-45] |
| Weight | approx. 60 kg |
*depending on arm confguration
The SHD series
iWH 2 - 2-Super Heavy Duty
Your contact
Thank you for your interest in our product. We are very pleased. Please write to us or call us for further information.
