Highlights
- Innovative all-in-one design
- Integrated measurement electronics
- Transparent, semi-transparent, perforated and opaque wafers can be aligned
Facts
Product type
Features
- Innovative all-in-one design
- Alignment times < 3.5 seconds
- Alignment accuracies: linear 0.025 mm, circular 0.02°
- Non-contact measurement using LED and CCD sensor
- Integrated measuring electronics
- Standalone-capable
- Chuck or pinload and change to a different wafer size without conversion
- Transparent, semi-transparent, perforated and opaque wafers can be aligned
- SEMI, flat and notch wafer specifications
- For wafer sizes from 4" to 12"
- Side and bottom connection panels available
Options
The Logosol Prealigners are innovative,
high-precision, Class 1 compatible Logosol
Prealigner solutions with integrated
scanning electronics.
The Logosol Prealigners are proprietary
products of Logosol, Inc. USA
www.logosolinc.com
Logosol
Prealigner Edge Handling
Edge Handling Logosol Prealigners are self-sufficient devices with passive contact in the edge area of the wafer. This guarantees maximum purity and freedom from stress when handling wafers from 75 mm Ø - 300 mm Ø. A high precision version is also available as an option.
Specifications click PDF.
by LOGOSOL
Logosol Prealigner
Edge Handling
Your contact
Thank you for your interest in our product. We are very pleased. Please write to us or call us for further information.
