Highlights
- Alignment times <2.5 seconds
- Transparent, semi-transparent, perforated and opaque wafers can be aligned
- For wafer sizes from 3" to 18"
Facts
Product type
Features
- Alignment times <2.5 seconds
- Non-contact measurement using LED and CCD sensor
- Integrated measuring electronics
- Chuck load
- Change to a different wafer size without conversion
- Transparent, semi-transparent, perforated and opaque wafers can be aligned
- SEMI, flat and notch wafer specifications
- For wafer sizes from 3" to 18"
- Side and bottom connection panels available
Options
The Logosol Prealigners are innovative,
high-precision, Class 1 compatible Logosol
Prealigner solutions with integrated
scanning electronics.
The Logosol Prealigners are proprietary
products of Logosol, Inc. USA
www.logosolinc.com
Logosol
Prealigner Embedded
1-axis Logosol prealigners (embedded) only work in conjunction with an Isel wafer handler and are integrated into the system as an additional axis. As this Logosol Prealigner only has one axis (rotation), correction values for centring the wafer are determined in the first step and the notch/flat is aligned. In the second step, the robot corrects the eccentric offset by adjusting the station coordinates when picking up the wafer. The wafer is always secured by means of a vacuum between the End Effectors and the Logosol Prealigner and is touched on the back. This Logosol Prealigner is a cost-effective solution for standard wafers from 45 mm Ø - 470 mm Ø.
The Logosol Prealigners are proprietary products of Logosol Inc. USA www.logosolinc.com.
Specifications click PDF.
by LOGOSOL
1-axis realigner
Embedded
Your contact
Thank you for your interest in our product. We are very pleased. Please write to us or call us for further information.
