Semiconductor goes future.

In addition to the wafer handlers, several other components are required for industrial wafer handling. The End Effectors are the most elementary component, as they are the attachment of the wafer handler and come into direct contact with the substrate. Due to the ever-increasing demands of the semiconductor industry, End Effectors are increasingly becoming a customised solution. This is why we at isel offer our customers customised End Effectors solutions in addition to our standard range. Different Logosol prealigners, hand-held operating devices and project-specific accessories are also used. isel customers receive Logosol prealigners in different designs and for different areas of application, for example very economical single-axis Logosol prealigners or absolutely specialised solutions for edge handling. We also supply modern hand-held operating devices. When it comes to robot accessories, we provide customised advice to rule out potential disruptions to the ongoing project from the outset and offer free handling tests with Logosol Prealigners or End Effectors in advance.

A good wafer handling robot is characterised not only by application-specific properties but primarily by

• Smooth running
• precision
• Durability
• ease of operation

Equally important are comprehensive service and support services and good accessibility of the manufacturer in the event of possible malfunctions. To ensure continuous production and maximum machine throughput, we offer our customers not only first-class robots for the semiconductor industry, but also comprehensive weekend support and continuous project support.

When used on a daily basis, isel handling robots are designed to last at least 7 years. If a wafer handler is regularly maintained and not fully utilised, the service life is significantly longer and can last up to 15 years. When mechanically stressed parts show the first signs of wear and the robot no longer works precisely and smoothly, it is time for refurbishing. In consultation with the client, all parts are checked for damage and replaced if necessary. The controller is updated to the latest hardware and software version. The handling robot is thus ready for use for the next few years for a fraction of the new price.

There is no generalised answer to the question of throughput, as this is influenced by many different factors. For example, the substrate to be transported, the End Effectors used and the size of the robot all play an important role. We therefore offer all customers a free cycle time study in order to determine individual throughput times in advance of a project.

In general, the wafer handling robot is very easy to install. An isel robot is supplied with detailed installation instructions that provide information on the relevant installation parameters and the necessary cabling. If you still have any questions, our service team will be happy to help and advise you.

The energy consumption of a wafer handling robot is very low compared to most energy-consuming processes in the semiconductor industry. Depending on the model and controller used, it is between 300 and 500 watts.

All isel robots are characterised by a high level of repeat accuracy and are valued by our customers for their outstanding workmanship and excellent running smoothness over many years. The model-dependent specifications can be found in the corresponding data sheets.

As the robots work in a cleanroom environment, they are thoroughly cleaned by isel quality assurance after the final inspection and before being wrapped in antistatic film. In order to remove any contamination caused by the installation of the system, the part of the robot located in the very clean working area (mini environment) is carefully cleaned with isopropanol and special lint-free cloths before the system is commissioned.

The cheapest wafer models are 3-axis robots with a short reach. The more axes the robot has, the longer its reach or the higher the handling weight, the greater the production effort and the associated acquisition costs.

The conversion of orthogonal coordinates - also known as Cartesian coordinates - into robot coordinates or joint coordinates is known as back transformation. To enable a robot to follow a defined path in space with its tool centre point (TCP), the robot controller cyclically calculates the joint or robot coordinates from the specified path points during travel. The joint coordinates determined in this way enable the robot's motors to move the individual robot arms to the correct positions.

The homogeneous transformation describes the position and orientation of the robot arms and places fixed coordinate systems in the robot arms for this purpose. This creates a chain of coordinate systems and transformations. A transformation matrix is used to convert a coordinate system into a subsequent coordinate system and robot coordinates into world coordinates. In robotics, rotation and translation matrices are predominantly required for rotary and push joints.

Matrices are required to convert the coordinate system of a link into another, the so-called rotation matrix. This is responsible for changing the orientation of a coordinate system in space and results in the location vector of the rotated coordinate system by multiplying it with a location vector (point coordinates).

For movements between two target positions, corresponding intermediate positions are calculated, i.e. interpolated, on the basis of programmed specifications. Interpolation types are point controls, multi-point controls or path controls, which calculate the joint position at the interpolation points with the reverse transformation. These setpoints are transferred to a control system to control the joint movement.

Singularities or singular positions are critical situations that can lead to mathematical instabilities when determining the joint angles and thus to the robot coming to a standstill. These situations correspond to special positions of the robot arm, e.g. outstretched or superimposed arms. One possible reason for a singular position is a division by zero. However, singularities can be largely prevented with a suitable software solution.

Most people associate the term "robotics" with intelligent, human-like machines. Isaac Asimov's three laws of robotics spring to mind. However, modern robotics is so much more than humanoid machines, but no less spectacular. Robots are used in situations and environments that are too dangerous for humans. As industrial robots, they perform complex tasks and processes in automation technology, working much faster and more precisely than humans and significantly increasing machine throughput and productivity. As wafer handlers in the semiconductor industry, they work fail-safe under clean room conditions, as golf robots they perfect the golf swing of ambitious golfers and in the chip industry they play a major role in the smartphone revolution thanks to their precision work. In short, it is impossible to imagine Industry 4.0 without intelligent robot control.

From medicine, research, education and the military to industry: robots are used in many areas. Industrial sectors in which the use of innovative robot technology is particularly pronounced are the automotive sector and the semiconductor industry, where the wafer handlers from isel Germany AG are used. In addition to semiconductor technology, isel cleanroom robots can also be found in display handling, LED production and general substrate handling.

Robotics is older than generally assumed, as the first experiments with automata were already documented in antiquity, for example automated theatre and music machines. The first humanoid machines were built around 1200 by Al-Jazari, an Arab engineer who allegedly also influenced Leonardo da Vinci. Modern robotics developed rapidly after the end of the Second World War, with the first mobile robot being developed at MIT in 1968. From then on, progress was unstoppable. Isel robotics emerged around 15 years ago and there are now more than 1,000 isel robot systems on the market.

Intelligent software and machines are already taking over a large part of automation technology today and will automate further areas of industry in the future. For US market researchers, robotics is the pioneering trend of our time, mechanising production processes and making them more effective, thereby increasing machine throughput. Experts predict that the use of artificial intelligence and modern robot control will double economic growth in Germany by 2035. This is a trend that will not stop at the semiconductor industry and requires the use of efficient robot kinematics - such as SCARA.

The transitions between mechatronics and robotics are fluid, as the two areas are closely interlinked. Mechatronics as a sub-area of robotics deals with the interaction of mechanics and electronics and thus lays the foundation for modern robot control.