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Wafer handler for transporting
wafers, masks and substrates

The flagship products of isel Robotics are robots for transporting wafers, masks and substrates in the semiconductor industry. These wafer handlers fulfil the strict ISO 1 cleanroom requirements and also impress with their precision and reliability. For over 15 years, these wafer handlers have been used very successfully worldwide in a wide variety of wafer processing cells, sorters and inspection systems. Thanks to the modular principle and a large selection of basic bodies and arm units, a wide range of possible combinations of standard components can be realised.

Melanie Schulz

Semiconductor Sales

+49 (0) 6659 981-737

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Teach Pendant

The teach pendant of the Advanced Controller is the latest development in our product portfolio. It offers the user the option of moving the wafer handler safely and with high precision without the need for another person, as well as programming or adjusting stations. The 6.5" touch display with the innovative GUI enables intuitive and simple operation for the user and is also equipped with softkeys that enable the selection of individual axes and increments, for example. However, most users will appreciate the integrated handwheel, which speeds up the set-up of stations enormously.

Teach Pendant

Lineartrack

Linear units from the iLD series with linear motors make it possible to extend the operating range of a robot by adding a fully integrated axis. Depending on requirements, they can be mounted either below or to the side of the wafer handler. Thanks to linear motors, the axes are characterised by high dynamics, low maintenance and smooth running. They offer precise positioning, high acceleration values and speeds with virtually wear-free operation. Lengths of up to 32 metres can be achieved using segment design and absolute encoders.

iLD Linear Track

End Effectors

Our specially developed End Effectors are optimised for handling wafers and are ideal for transport, for example from a cassette to a prealigner. These tools are available in sizes from 2" (50mm) to 12" (300mm) and in horse shoe or paddle versions. Thanks to their low weight and high rigidity, they are indispensable for your production processes.

End Effectors

End Effectors Changer

The End Effectors Changer is a state-of-the-art, fully automated system designed specifically for the efficient and seamless changing of end effectors. Equipped with advanced software effector management, the End Effectors Changer ensures precise control and management of your end effectors. The changer is universally compatible and suitable for all types of End Effectors.

Wafer Mapping Sensor

This advanced sensor is equipped with two 850 mm diode lasers that ensure reliable and accurate performance for various applications. The sensor has an optimum detection range of 38 mm (1.5") and offers a maximum detection range of up to 40 mm (1.6"). The laser class 1 rated sensor ensures user safety while maintaining high efficiency and precision in laser operation. The PNP configuration improves compatibility with other electronic systems and makes it an ideal choice for seamless integration into your existing system.

Through Beam Sensor

The use of through beam sensors, e.g. in the tip of a horse shoe End Effectors, is an alternative to the universally applicable reflective mapping sensors. The advantages of this method are its insensitivity to specially reflective or light-absorbing coatings or materials, as well as its cost efficiency compared to conventional mapping sensors. However, this is not possible with all End Effectors due to their design. Please contact us for possible solutions that we can also realise in addition to the standards.

Flip module

The flip module allows the user to rotate wafers and other substrates by a fixed angle without having to lay them down. High precision is guaranteed through the use of adjustable end stops, electronic ramps and infinitely variable speeds. Almost all End Effectors and an optional mapping sensor can be mounted. Use is not possible with all robot models.

Our catalogue for 
Wafer Handling Robots

Our products are specially developed and designed for the semiconductor industry. If you have special applications or product requirements, please contact us.

With several thousand systems in use and many years of experience, we look forward to your enquiry.

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