Handling with wafers.

End Effectors

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Handling of wafers with

specially developed End Effectors

Our highly specialised End Effectors have been specially developed for handling wafers. These precise tools are ideal for transporting wafers, for example from a cassette to a prealigner. The standard End Effectors are available in sizes from 2" (50mm) to 12" (300 mm) and offer you the choice between the Horse Shoe or Paddle version.

Our End Effectors are characterised by their low weight and high rigidity, making them an indispensable part of your production processes. In addition, we can supply them with a variety of contact materials such as PTFE, PEEK, VITON, KALREZ and many other options to meet your specific requirements.

Melanie Schulz

Semiconductor Sales

+49 (0) 6659 981-737

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End Effectors - iEE Series

End Effectors are designed for the handling of wafers, such as the transport from a cassette to the prealigner. Standard End Effectors are available for wafer sizes from 2" (50mm) to 12" (300 mm) as horse shoe or paddle versions.

Types: Paddle 4-8" EE, Horse-Shoe 8-12" EE, Extended 4-8", Extended Horse-Shoe, Ceramic EE, Double EE, Friction EE and Exclusion Zone EE

Various contact materials

The End Effectors are optionally available with many different contact materials such as PTFE, PEEK, VITON, KALREZ, etc. In addition to our standard products, we also offer many special designs for your specific wafers and substrates and are also happy to design new solutions.

Types: Warp / Bow Wafer, Through Beam EE, Edge Grip EE, Frame EE, Customised 4", Customised EE, Panel EE and Panel EE

Special designs

In addition to our standard products, we also offer numerous customised designs that are tailored to your specific wafers and substrates. Our team of experts is at your disposal to develop customised solutions that are perfectly tailored to your needs. Put your trust in our expertise and optimise your production processes with our innovative End Effectors.

  • Pocket EE
  • Friction Wafer
  • Edge Grip EE
  • Exclusion zone Grip EE
  • Exclusion zone Vacuum EE
  • Multiple EE
  • Through Beam EE
  • Customised solutions

Customised options

  • Various wafer mapping sensors
  • Various surface coatings
  • Vacuum evaluation unit
  • Flip module
  • Pusher

Our catalogue for 
Wafer Handling Robots

Our products are specially developed and designed for the semiconductor industry. If you have special applications or product requirements, please contact us.

With several thousand systems in use and many years of experience, we look forward to your enquiry.

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