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Wafer handler for transporting
wafers, masks and substrates

The flagship products of isel Robotics are robots for transporting wafers, masks and substrates in the semiconductor industry. These wafer handlers fulfil the strict ISO 1 cleanroom requirements and also impress with their precision and reliability. For over 15 years, these wafer handlers have been used very successfully worldwide in a wide variety of wafer processing cells, sorters and inspection systems. Thanks to the modular principle and a large selection of basic bodies and arm units, a wide range of possible combinations of standard components can be realised.

Melanie Schulz

Semiconductor Sales

+49 (0) 6659 981-737

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Series 1 wafer handler

Series 1 robots are designed for wafer handling. Thanks to the modular system, various base bodies from 7" to 21" Z-stroke can be combined with many different arm assemblies from 10.5" to 28". Depending on the combination of axes, handling weights of up to 3 kg are possible.

iWH Single Arm

Series 3 wafer handler

Series 3 robots with dual arms have the potential to increase the throughput of an application. Thanks to the two independent arms, wafers can be exchanged very quickly, thus avoiding empty runs.

iWH Dual Arm

The connection of further components to the Isel Wafer Handler (IWH), such as mapping sensor, flip moduleAlignment on the Fly sensors, prealigner, Linear unit or customised End Effectorsis easy to realise. The Isel wafer handler is controlled via the Advanced Controller. Operation with a third-party controller is also possible. A huge portfolio of pre-installed macros is available for programming.