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Logosol Prealigner

The Logosol LPA series prealigners are an innovative, high-precision, Class 1 cleanroom solution with integrated scanning electronics. These Logosol prealigners enable the alignment of 45 mm up to 480 mm objects, regardless of their degree of transparency. They centre wafers, masks and other substrates, detect notch, flat or other marks and align the object precisely and independently.

The Logosol Prealigners are innovative, high-precision, class 1 compatible Logosol Prealigner solutions with integrated scanning electronics. The Logosol Prealigners are proprietary products of Logosol, Inc. USA www.logosolinc.com

Andreas Möller

Semiconductor Sales

+49 (0) 6659 981-755

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Logosol 1-axis realigner
"Embedded

Logosol 1-axis prealigners "Embedded" only work in conjunction with an isel wafer handler and are integrated into the system as an additional axis. As this Logosol prealigner only has one axis (rotation), correction values for centring the wafer are determined in the first step and the notch/flat is aligned. In the second step, the robot corrects the eccentric offset by adjusting the station coordinates when picking up the wafer. The wafer is always secured by means of a vacuum between the End Effectors and the Logosol Prealigner and is touched on the back. This Logosol Prealigner is a cost-effective solution for standard wafers from Ø 45 mm - Ø 470 mm.

Prealigner "Embedded"

Logosol 3-axis realigner
"Standalone

Logosol "Standalone" 3-axis prealigners are independently operating devices that align wafers and square or rectangular substrates from 45 mm Ø - 480 mm Ø with high precision, regardless of their degree of transparency. The alignment of different objects with several different sizes is realised without mechanical adjustment on the Logosol Prealigner. The Logosol Prealigner has a chuck-load and pin-load mode as well as optional high precision mode, dual layer function (stacked wafer) or external sensors for detecting an edge mark. By means of vacuum on chuck and pins, the wafer is always held securely and only touched on the back. Many different contact materials are optionally available for chuck and pins, as well as friction chucks (without vacuum). As the 3-axis Logosol prealigners work autonomously and have both an RS232 and an Ethernet interface, the devices can be integrated into any robot system.

Prealigner "Standalone"

Logosol Prealigner
"Edge Handling

Logosol Prealigner "Edge Handling" are self-sufficient devices with passive contact in the edge area of the wafer. This guarantees maximum purity and freedom from stress when handling wafers from 75 mm Ø - 300 mm Ø. A high-precision version is also available as an option.

Prealigner "Edge Handling"

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