Triple-axis Prealigners LPA Series

SKU
3-Achs Prealigner "Standalone"
Delivery Time
on request
  • Alignment cycle time < 2.5 seconds
  • Contactless measuring via LED and CCD senor
  • Transparent, semi-transparent, punched and opaque wafers alignable
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    Technical sales iselRobotik


    Andreas Möller

       Andreas Möller

    Triple-axis Prealigners LPA Series

    Description

    The isel IPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics. The prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.

    Characteristics

    • Alignment cycle time < 2,5 Seconds
    • Contactless measuring via LED and CCD senor
    • Integrated scan electronics
    • Chuck Load
    • Wafer size changing without mechanical changes
    • Transparent, semi-transparent, punched and opaque wafers alignable
    • SEMI, Flat and notch wafer specifications
    • For wafer sizes from 2'' up to 12''
    • Side-entry and back entry cable configurations

    ROBOTIK Allgemein/Generally

    Characteristics

    Specifications

    Prealigner model

    Standalone

    Embedded

    Edge handling

    26-3

    38-3

    58-3

    312-3

    812-3

    1218-3

    25-1E

    38-1E

    58-1E

    312-1E

    812-1E

    1218-1E

    Type

    Wafer
    diameter

    2"

    3"

    100 mm

    4EH, 45EH

    125 mm

    5EH, 45EH, 56EH

    150 mm

    6EH, 56EH

    200 mm

    8EH, 8ET

    300 mm

    12ET

    450 mm

    Square substrates

    n/a

    Angular accuracy
    (3 sigma)

    10 000 CPR encoder

    0.04°

    n/a

    0.06°

    n/a

    0.04°

    24 000 CPR encoder

    0.02°

    0.04°

    0.02°

    Centering accuracy
    (3 sigma)

    25 µm

    50 µm

    25 µm

    Max initial offset

    10 mm

    12 mm

    9 mm

    10 mm

    1.7 to 2.0 mm

    Body
    dimensions

    W

    173 mm

    95 mm

    173 mm

    L

    267 mm

    317 mm

    404 mm

    266 mm

    328 mm

    267 or 317 mm

    H

    190 mm

    191 mm

    190 to 196 mm

    Weight

    5.0 to 5.7 kg

    3.4 to 3.8 kg

    5.3 to 6.0 kg

    Servo axes

    three

    one

    three

    Handling

    vacuum chuck and pins

    vacuum chuck

    edge handling

    Facilities required

    100-240VAC, 50-60 Hz, 48 V A or 24 V DC/2A, vacuum 12" Hg for vacuum retention

    Host interface

    RS232, Ethernet

    Flat / Notch compatibility

    SEMI standards compliant

    Wafer opacity

    transparent, semi-transparent and opaque

    Cleanliness

    class 1

    MTBF

    more than 70000 hours

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