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IWH Series 1 with 2 link compact arm and 7 inch body series 1

  • Excellent structural rigidity and precision
  • Maximum reliability and precision
  • Top mounted (TA) or bottom mounted (BA) versions available
  • Customized designs

Availability: In stock

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Technical sales iselRobotik


Andreas Möller

   Andreas Möller

IWH Series 1 with 2 link compact arm and 7 inch body series 1

Series 1 wafer handlers robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

  • cost-effective
  • excellent structural rigidity and precision
  • maximum reliability 
  • top mounted (TA) or bottom mounted (BA) versions available 
  • customized designs
  • incremental encoder
  • seamless integration with prealigner, linear track and other periphal components 
  • including „Standard“ controller and software
  • ISO 1 clean-room environment compatible
  • MTBF: > 50,000 operating hours

Additional Information

Repeatability
  • T: +/- 0,02 °
  • R: +/- 0,02 mm
  • Z: +/- 0,02 mm
Working range
  • Z: 7"
  • radial: 10", 14"
  • theta: 450°
Payload
  • up to1 kg
Maximum speed
  • T: 360°/s
  • R: 1.000 mm/s
  • Z: 450 mm/s
Power supply
  • 115 – 230 VAC 
  • 50 – 60 Hz 
  • 300 VA
Main interface
  • RS-232 [DB9]
  • Ethernet [RJ-45]
Weight
  • approx. 19 kg
Product Description

IWH Series 1 with 2 link compact arm and 7 inch body series 1

Series 1 wafer handlers robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...

Characteristics

  • cost-effective
  • excellent structural rigidity and precision
  • maximum reliability 
  • top mounted (TA) or bottom mounted (BA) versions available 
  • customized designs
  • incremental encoder
  • seamless integration with prealigner, linear track and other periphal components 
  • including „Standard“ controller and software
  • ISO 1 clean-room environment compatible
  • MTBF: > 50,000 operating hours
Additional Information

Additional Information

Repeatability
  • T: +/- 0,02 °
  • R: +/- 0,02 mm
  • Z: +/- 0,02 mm
Working range
  • Z: 7"
  • radial: 10", 14"
  • theta: 450°
Payload
  • up to1 kg
Maximum speed
  • T: 360°/s
  • R: 1.000 mm/s
  • Z: 450 mm/s
Power supply
  • 115 – 230 VAC 
  • 50 – 60 Hz 
  • 300 VA
Main interface
  • RS-232 [DB9]
  • Ethernet [RJ-45]
Weight
  • approx. 19 kg
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