IWH Series 1 with 2 link compact arm and 7 inch body series 1

IWH Series 1 with 2 link compact arm and 7 inch body series 1

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Series 1 wafer handlers robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 1 kg are also possible with the appropriate combination of axes...

Characteristics

• wafer handling up to 200 mm
• cost-effective
• excellent structural rigidity and precision
• maximum reliability
• top mounted (TA) or bottom mounted (BA)
• versions available
• customized solutions
• incremental encoder
• seamless integration with prealigner, linear
• track and other periphal components
• including „STANDARD“ controller and software
• ISO 1 clean-room environment compatible
• MTBF: 70,000 operating hours