Series 3 with Single Arm
- IWH Series 3 with 3-Link-Heavy Duty-Arm and Heavy-Duty-Body SKU: IWH Serie3 - 2link-HDplus-Arm
Series 3 single-arm wafer handlers:
Series 3 single-arm robots are used wherever a higher structural rigidity is required. They can be used with loads of up to 3 kg, even in combination with long arm modules and a large Z stroke of up to 21".