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Series 3 with Dual Arm

Waferhandler Series 3 with Dual Arm

Series 3 dual-arm robots have the potential to increase the throughput of an application. The two independent arms mean that the wafers on a station can be replaced very quickly and thus empty runs are prevented.

Even in combination with long arm modules and a large Z stroke of up to 21", loads of up to 3 kg can be achieved.

Par ordre décroissant

Par ordre décroissant