Series 3 with Dual Arm
Waferhandler Series 3 with Dual Arm
Series 3 dual-arm robots have the potential to increase the throughput of an application. The two independent arms mean that the wafers on a station can be replaced very quickly and thus empty runs are prevented.
Even in combination with long arm modules and a large Z stroke of up to 21", loads of up to 3 kg can be achieved.