WAFER HANDLING ROBOT | IWH with SHD super heavy duty arm and SHD body

IWH Series SHD with SHD super heavy duty dual arm and SHD body
Delivery Time
on request
  • excellent structural rigidity
  • proven for panel handling
  • maximum reliability and precision
  • seamless integration with prealigner, linear track and other peripheral components
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isel France

ZAC de la Prévauté
4, Rue des Côtes d’Orval BP 41
F-78550 Houdan

Phone: +33 (0) / 130 461 201
Fax: +33 (0) 130596932

eMail: info@isel.fr

Telefonzentrale isel

Series SHD with SHD super heavy duty dual arm and SHD body

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Series SHD robots are used wherever a higher structural rigidity is required. Maximum reliability and precision due to the integrated 2-channel vacuum display.


  • Excellent structural rigidity
  • Wafer handling of up to 450mm
  • Maximum reliability and precision
  • Easy connection of a linear track to the robot controller
  • Very smooth running
  • Backlash free Harmonic Drive® gears
  • Absolute encoder
  • Integrated 2-channel vacuum display
  • Including „Advanced“ Controller & Software
  • MTBF: > 50,000 operating hours
  • Made in Germany
ROBOTIK Allgemein/Generally
(Size: 4.7 MB)
Last update 2022/10/19
Repeatability T ±0.02°  
R ±0.02 mm  
Z ±0.02 mm  
Working range Z 13", 15"  
radial 14", 16"  
theta 500°  
Payload   up to 5 kg (per arm)*  
Maximum speed T 180°/s  
R 800 mm/s  
Z 300 mm/s  
Power supply   115 – 230 VAC 50 – 60 Hz800 VA  
Main interface   RS-232 [DB9],Ethernet [RJ-45]  
Weight   approx. 60 kg  

*depending on arm confguration