Edge Handling Prealigner LPA-Series

SKU
3-Achs Prealigner Egde Handling
Delivery Time
on request
  • Alignment cycle time < 3.5 seconds
  • Repeating accuracy: linear 0,025 mm, circular 0,02°
  • Transparent, semi-transparent, punched and opaque wafers alignable
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Technical sales iselRobotik


Andreas Möller

   Andreas Möller

Edge Handling Prealigner LPA-Series

Description

The isel LPA series prealigners are innovative, high precision, class 1 compatible prealigner solutions with integrated scan electronics.
The prealigners are designed and manufactured by Logosol, Inc. USA and isel Germany AG is the exclusive authorized distributor for Europe.

Characteristics

• innovative All-in-one-Design
• Alignment cycke timw < 3.5 seconds
• Repeating accuracy: linear ±0,025 mm, circular ± 0,05°
• Contactless measuring via LED and CCD sensor
• Integrated scan electronics
• stand.alone capable
• Chuck- or Pinload as well as wafer size changing without machanical changes
• transparent, semi-transparent, punched and opaque wafers alignable
• SEMI, Flat and Notch wafer specifications
• For wafer sizes from 2'' up to 12''
• Bottom-entry and side entry cable configurations

ROBOTIK Allgemein/Generally

Characteristics

Specifications

Prealigner model

Standalone

Embedded

Edge handling

26-3

38-3

58-3

312-3

812-3

1218-3

25-1E

38-1E

58-1E

312-1E

812-1E

1218-1E

Type

Wafer
diameter

2"

3"

100 mm

4EH, 45EH

125 mm

5EH, 45EH, 56EH

150 mm

6EH, 56EH

200 mm

8EH, 8ET

300 mm

12ET

450 mm

Square substrates

n/a

Angular accuracy
(3 sigma)

10 000 CPR encoder

0.04°

n/a

0.06°

n/a

0.04°

24 000 CPR encoder

0.02°

0.04°

0.02°

Centering accuracy
(3 sigma)

25 µm

50 µm

25 µm

Max initial offset

10 mm

12 mm

9 mm

10 mm

1.7 to 2.0 mm

Body
dimensions

W

173 mm

95 mm

173 mm

L

267 mm

317 mm

404 mm

266 mm

328 mm

267 or 317 mm

H

190 mm

191 mm

190 to 196 mm

Weight

5.0 to 5.7 kg

3.4 to 3.8 kg

5.3 to 6.0 kg

Servo axes

three

one

three

Handling

vacuum chuck and pins

vacuum chuck

edge handling

Facilities required

100-240VAC, 50-60 Hz, 48 V A or 24 V DC/2A, vacuum 12" Hg for vacuum retention

Host interface

RS232, Ethernet

Flat / Notch compatibility

SEMI standards compliant

Wafer opacity

transparent, semi-transparent and opaque

Cleanliness

class 1

MTBF

more than 70000 hours

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