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Series 1 wafer handlers robots
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Our wafer handler robots are designed for wafer handling. The modular system allows the combination of various base bodies, from 7" to 21" Z stroke, with a large number of different arm modules from 10.5" to 28". Handling weights of up to 3 kg are also possible with the appropriate combination of axes...
- Excellent strucutural rigidity
- Maximum reliability and precision
- Top mounted (TA) or bottom mounted (BA) versions available
- Customized designs
- Absolute or incremental encoder
- Seamless integration with prealigner, linear track and other periphal
- Including "Standard" or "Advanced" Hard- & Software
- ISO 1 clean-room environment compatible
- Made in Germany