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IWH Series 3 with 2-link dual arm and body series 3
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Our wafer handler robots have the potential to increase the throughput of an application. The two independent arms mean that the wafers on a station can be replaced very quickly and thus empty runs are prevented.
- Excellent structural rigidity
- Wafer handling of up to 300mm
- Maximum reliability and precision
- Easy connection of a linear track to the robot controller
- Very smooth running
- ® Backlash free Harmonic Drive gears
- Absolute, incremental encoder or resolver
- Integrated 2-channel vacuum display
- Including „Standard“ or „Advanced“ Controller & Software
- ISO 1 clean-room environment compatible
- MTBF: > 50,000 operating hours
- Made in Germany
|Weight||approx. 25 – 40 kg|